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Cambridge cf4 multi-analyser

Cambridge cf4 multi-analyser

Feb 26, 2011Anisotropic Reactive Ion Etching of Submicron W Features In CF4 or SF6 Plasmas - Volume 240 - T. R. Fullowan, F. Ren, S. J. Pearton, G. E. Mahoney, R. L. KostelakAuthor: T. R. Fullowan, F. Ren, S. J. Pearton, G. E. Mahoney, R. L. KostelakLocation: New YorkPublish Year: 1991Reactive Ion Etching of Molybdenum In CF4/O2 Plasma | MRS ...

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