The fluorine plasma is the main component that performs the etching process. Since it is listed as a toxic gas under COSHH regulations, it is imperative that companies using SF 6, as part of the process, monitor for any leaks or accidental release. New SF6 Gas Detection SolutionsThe pyrolysis and subsequent oxidation of SF6 - ScienceDirect
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Get PriceAbstract: The increasing application of SF6 as an insulating gas has led to many studies on SF6 decomposition in gas-insulated equipment. In the presence-of an electric arc, spark or corona, SF6 decomposes to a wide variety of chemically active products which possess completely different properties from SF6.[PDF]Do's and Don'ts of SF6 Gas Handling
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