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[email protected]Gasbanor (Schweiz) GmbH, Micafluid has its legal headquarters in Schlieren and is active. It is a Limited liability company and active in the industry «Trading with machines. The management of the company Gasbanor …Founded: Oct 11, 2012Maxwell Technologies Ultracapacitors and Supercapacitors
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Get PriceA process for selectively etching a substrate 20 having a molybdenum silicide layer 25 with a resist material 26 on portions of the molybdenum silicide layer 25 is described. The substrate 26 is placed into an etch zone 54 and the process gas comprising SF 6 and HBr is introduced into the etch zone 54. Preferably, the volumetric flow ratio of SF 6 :HBr is from about 1:10 to about 1:1, and more ...Cited by: 61Publish Year: 1994Author: Ernest L Cheung, Tsai Patty Hui-IngEtching | Trion Technology
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