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laboratory PH3 gas detection equipment

laboratory PH3 gas detection equipment

Phosphine is also used as a dopant in the semiconductor industry and a precursor for the deposition of compound semiconductors. Recently, high purity tertiary butyl phosphine (TBP) has been developed as a less hazardous liquid alternative to highly toxic phosphine gas for application in Metalorganic Vapor Phase Epitaxy (MOVPE) of III-V compound semiconductors.

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