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pumping EX gas leak detection

pumping EX gas leak detection

2018-4-24Real leaks, gas entering the chamber from the outside, will cause the pump-down to stall at a higher pressure than normal. These real leaks result in a pump-down curve resembling the one shown in brown in Figure 2. Figure 1. Leak detection of large volume vacuum chambers. Figure 2. Typical vacuum pump-down curves. 0 5 10 15 20 25 30 Real leak ...

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